ALEXANDRIA, Va., April 15 -- United States Patent no. 12,599,860, issued on April 14, was assigned to EDWARDS VACUUM LLC (Sanborn, N.Y.).
"Liquid filter apparatus with thermal shield" was invented by Imad Mahawili (Roseville, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A liquid filter apparatus for gas/solid separation includes a housing with a filter chamber, a semiconductor process gas inlet, and a process gas outlet. The filter chamber forms a liquid reservoir, and the semiconductor process gas inlet and the process gas outlet are in communication with the filter chamber. The housing further includes a filter liquid inlet and a filter liquid outlet, which are in communication with the liquid res...