US Patent Issued to Edwards on Sept. 1 for "Modular abatement apparatus" (British, American Inventors)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,723,755, issued on Sept. 1, was assigned to Edwards Ltd. (Burgess Hill, Great Britain).

"Modular abatement apparatus" was invented by Andrew James Seeley (Clevedon, Great Britain), David Frederick Bartz (San Jose, Calif.) and Michael Jay Silberstein (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A modular abatement apparatus is for abatement of an effluent stream from a semiconductor processing tool and comprises: a housing defining a common housing chamber; a plurality of combustion chamber modules positionable within the common housing chamber for treating the effluent stream, each combustion chamber module containing a foraminous sl...