US Patent Issued to EBARA on July 14 for "Pre-wet module" (Japanese Inventor)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,685,063, issued on July 14, was assigned to EBARA Corp. (Tokyo).

"Pre-wet module" was invented by Mitsutoshi Yahagi (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "To achieve a small-sized pre-wet module that can perform different pre-processes.A pre-wet module 200 includes a stage 220, a rotation mechanism 224, a cleaning liquid supply member 260, and a deaerated liquid supply member 250. The stage 220 is configured to hold a back surface of a substrate WF with a surface to be processed WF-a facing upward. The rotation mechanism 224 is configured to rotate the stage 220. The cleaning liquid supply member 260 has a nozzle 262 arranged above the st...