ALEXANDRIA, Va., July 7 -- United States Patent no. 12,673,396, issued on July 7, was assigned to DISCO Corp. (Tokyo).
"Constant-temperature liquid supply apparatus" was invented by Tadaomi Matsumoto (Tokyo) and Masaru Saito (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A constant-temperature liquid supply apparatus includes a circulation route for circulating liquid between an inlet and an outlet connected to a processing apparatus, a tank that accommodates the liquid supplied through the inlet, a pump that discharges the liquid in the tank, a temperature adjusting unit that adjusts the temperature of the liquid, an outflow quantity measuring section that measures the flow rate of the liquid, a sole...