ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,560,557, issued on Feb. 24, was assigned to DISCO Corp. (Tokyo).
"Inspection method of workpiece and inspection apparatus" was invented by Hayato Iga (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "An inspection method of a workpiece includes a separation layer forming step of forming a separation layer composed of a modified layer parallel to an upper surface and cracks that extend from the modified layer inside the workpiece, an irradiation step of irradiating the whole of the upper surface of the workpiece in which the separation layer has been formed with light with such a wavelength as to be transmitted through the workpiece and reflect at th...