US Patent Issued to DISCO on Dec. 16 for "Gettering layer forming device and processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,496,674, issued on Dec. 16, was assigned to DISCO Corp. (Tokyo).

"Gettering layer forming device and processing apparatus" was invented by Fumiteru Tashino (Tokyo), Masashi Aoki (Tokyo) and Xiaoming Qiu (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gettering layer forming device includes a spinner table having a surface for holding a face side of a wafer, and an annular rest surface disposed radially outwardly of the holding surface. An annular member is located on the rest surface surrounding the wafer such that a water bath is defined by the annular member and the wafer. A moving mechanism selectively places the annular member onto the rest ...