ALEXANDRIA, Va., April 21 -- United States Patent no. 12,605,801, issued on April 21, was assigned to DISCO Corp. (Tokyo).
"Chuck table manufacturing method" was invented by Junsoo Woo (Tokyo) and Tomotaka Tabuchi (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A chuck table manufacturing method capable of changing over the shape of a holding surface according to at least two workpieces different in area or shape includes a porous plate sticking step of sticking a frame body and a porous plate to each other while the porous plate is accommodated in a recess of the frame body with an upper surface of the porous plate being exposed, a groove forming step of forming, in the porous plate, a groove reaching...