ALEXANDRIA, Va., April 15 -- United States Patent no. 12,604,699, issued on April 14, was assigned to DISCO Corp. (Tokyo).
"Processing apparatus" was invented by Yunfeng Yang (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A processing apparatus includes a holding table including a holding surface that holds a back surface side of a substrate and a processing unit that processes the substrate held on the holding surface. The holding surface includes a holding section that holds a central region of the substrate, a discharge groove that surrounds the holding section, and an outer circumferential groove that surrounds the discharge groove and communicates with a suction source to hold under suction the s...