US Patent Issued to DAICEL on Sept. 22 for "Detergent composition and chemical-mechanical polishing composition comprising an alkanol hydroxylamine and polyglycerol derivative mixture" (Japanese Inventor)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,742,133, issued on Sept. 22, was assigned to DAICEL Corp. (Osaka, Japan).

"Detergent composition and chemical-mechanical polishing composition comprising an alkanol hydroxylamine and polyglycerol derivative mixture" was invented by Yuichi Sakanishi (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "A detergent composition and a polishing composition are provided. The detergent composition facilitates sufficient removal of polishing agents, metal microparticles, and anticorrosives in cleaning of a semiconductor substrate and long-term maintenance of flatness of a metal wiring surface after cleaning and achieves excellent quality stability for a long ...