US Patent Issued to Cymer on March 24 for "Apparatus for and method of generating multiple laser beams" (California Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,586,978, issued on March 24, was assigned to Cymer LLC (San Diego).

"Apparatus for and method of generating multiple laser beams" was invented by Walter Dale Gillespie (Poway, Calif.), Joshua Jon Thornes (San Diego), Thomas Patrick Duffey (San Diego), Eric Anders Mason (San Diego) and Rabin Paudel (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "Apparatus for and method of generating multiple laser beams using multiple laser chambers. The relative timing of the beams is controllable so they may, for example, be interleaved, may overlap, or be prevented from overlapping, or may occur in rapid sequence. The beams may have different spectral and ...