US Patent Issued to Cymer on Dec. 2 for "Prolonged life laser chamber electrode and laser having same" (California Inventor)

ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,489,266, issued on Dec. 2, was assigned to Cymer LLC (San Diego).

"Prolonged life laser chamber electrode and laser having same" was invented by Leyla Ramin (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is an electrode for a laser chamber comprising an alloy of a first metal having a first free energy of formation with fluorine greater than or equal to the free energy of formation with fluorine of copper, and a second metal having a second free energy of formation with fluorine less than the first free energy."

The patent was filed on Aug. 28, 2019, under Application No. 17/272,999.

*For further information, including images, char...