US Patent Issued to Commissariat a l'Energie Atomique et aux Energies Alternatives on Aug. 4 for "MEMS device manufacturing method" (French Inventors)

ALEXANDRIA, Va., Aug. 5 -- United States Patent no. 12,698,203, issued on Aug. 4, was assigned to Commissariat a l'Energie Atomique et aux Energies Alternatives (Paris).

"MEMS device manufacturing method" was invented by Audrey Berthelot (Grenoble Cedex, France) and Philippe Robert (Grenoble Cedex, France).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present description concerns a method of manufacturing a microelectromechanical device, including the following successive steps: providing an SOI structure comprising a first semiconductor layer on an insulating layer; forming a second semiconductor layer by epitaxy on top of and in contact with the upper surface of the first semiconductor layer; transferr...