US Patent Issued to Carl Zeiss SMT on Sept. 2 for "Device and method for operating a bending beam in a closed control loop" (German Inventors)

ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,405,289, issued on Sept. 2, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Device and method for operating a bending beam in a closed control loop" was invented by Christof Baur (Darmstadt, Germany) and Florian Demski (Muhltal, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates to a device for operating at least one bending beam in at least one closed control loop, wherein the device has: (a) at least one first interface designed to receive at least one controlled variable of the at least one control loop; (b) at least one programmable logic circuit designed to process a control error of the at least one co...