US Patent Issued to Carl Zeiss SMT on Oct. 6 for "Screw transmission drive, and reticle stage and measuring device for semiconductor lithography applications" (German Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,754,486, issued on Oct. 6, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Screw transmission drive, and reticle stage and measuring device for semiconductor lithography applications" was invented by Stephan Zschack (Weissendorf, Germany), Alexander Heidenreich (Jena, Germany), Ullrich Klarner (Jena, Germany) and Steffen Weissenberg (Rackwitz, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "The invention relates to a screw transmission drive, in particular for the reticle stage of a device for lithography applications, comprising a leadscrew, which has a power transmission thread and a leadscrew nut which interacts with the power trans...