US Patent Issued to Carl Zeiss SMT on Nov. 3 for "Segmentation or cross sections of high aspect ratio structures" (German Inventors)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,784,228, issued on Nov. 3, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Segmentation or cross sections of high aspect ratio structures" was invented by Dmitry Klochkov (Schwabisch Gmund, Germany), Jens Timo Neumann (Aalen, Germany), Thomas Korb (Schwabisch Gmund, Germany), Eno Toppe (Aalen, Germany), Johannes Persch (Etgert, Germany), Abhilash Srikantha (Neu-Ulm, Germany) and Alexander Freytag (Erfurt, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method identifies ring structures in pillars of high aspect ratio (HAR) structures. For segmentation of rings, a machine learning-logic is used. A two-step training method for the mach...