US Patent Issued to Carl Zeiss SMT on Nov. 3 for "Method for simulating illumination and imaging properties of an optical production system when illuminating and imaging an object by means of an optical measurement system" (German Inventors)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,782,824, issued on Nov. 3, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Method for simulating illumination and imaging properties of an optical production system when illuminating and imaging an object by means of an optical measurement system" was invented by Alexander Winkler (Oberkochen, Germany), Klaus Gwosch (Oberkochen, Germany) and Markus Koch (Oberkochen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A metrology system having an optical measurement system serves to simulate illumination and imaging properties of an optical production system when an object is illuminated and imaged. The optical measurement system has an ill...