ALEXANDRIA, Va., March 24 -- United States Patent no. 12,585,194, issued on March 24, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).
"Method and swapping tool" was invented by Eugen Doetzel (Ulm, Germany), Johannes Kruis (Oberkochen, Germany), Benjamin Sigel (Aalen, Germany), Dietmar Duerr (Dettingen, Germany), Tobias Hegele (Aalen, Germany), Alexander Ostendorf (Langenau, Germany), Sebastian Henseler (Aalen, Germany), Christian Beyrle (Aalen, Germany), Christian Werner (Beek en Donk, Netherlands) and Alexander Kaniut (Remshalden, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for swapping an optical system, such as a DUV mirror, of a projection exposure apparatus, comprises: a) ...