US Patent Issued to CARL ZEISS SMT on July 28 for "Method and apparatus for deposition of at least one layer, optical element and optical arrangement" (German Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,692,603, issued on July 28, was assigned to CARL ZEISS SMT GMBH (Oberkochen, Germany).

"Method and apparatus for deposition of at least one layer, optical element and optical arrangement" was invented by Felix Lange (Giengen an der Brenz, Germany), Alexandra Pazidis (Essingen-Lautenburg, Germany), Marcel Haertling (Aalen, Germany) and Alexander Wiegand (Aalen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosed techniques relate to a method for depositing at least one layer composed of an ionically bonded solid on a substrate, comprising the following steps: converting a coating material to the gas phase and depositing the coating mater...