ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,546,921, issued on Feb. 10, was assigned to CARL ZEISS SMT GMBH (Oberkochen, Germany).
"Mirror assembly and optical assembly comprising same" was invented by Alexandra Pazidis (Essingen-Lautenburg, Germany), Kerstin Hild (Waldstetten, Germany) and Thilo Pollak (Neresheim, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A mirror arrangement (30) includes: a substrate (31) with a front side (31a) having a mirror face (32a) reflecting radiation (5), and a rear side (31b) facing away from the front side and on which at least one actuator (27) generating deformations of the mirror face is arranged. A water vapor (36)-sorbing material (33, 42) is forme...