US Patent Issued to Carl Zeiss SMT on April 21 for "Method and device for drying a component interior" (German Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,607,401, issued on April 21, was assigned to Carl Zeiss SMT GmbH (Oberkochen, Germany).

"Method and device for drying a component interior" was invented by Arvid Maczeyzik (Aalen, Germany) and Patrick Paul (Ulm, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for drying a component interior of a component can be used in a lithographic process chain. The method includes a first drying step, in which simultaneously heated air is admitted into a component interior through an inlet, and the heated air is sucked out of the component interior through an outlet. The method also includes a succeeding second drying step, in which the inlet for t...