US Patent Issued to CANON on March 24 for "Measurement apparatus, lithography apparatus, and method of manufacturing article" (Japanese Inventor)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,585,202, issued on March 24, was assigned to CANON K.K. (Tokyo).

"Measurement apparatus, lithography apparatus, and method of manufacturing article" was invented by Tadashi Hattori (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a measurement apparatus that measures a position of an object, comprising: a detector configured to irradiate a measurement target point of the object with light having a plurality of wavelengths, and detect a position of the measurement target point based on the light reflected by the measurement target point; and a processor configured to determine the position of the object based...