US Patent Issued to CANON on June 23 for "Forming method, forming apparatus, and article manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,712, issued on June 23, was assigned to CANON K.K. (Tokyo).

"Forming method, forming apparatus, and article manufacturing method" was invented by Tadashi Hattori (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A forming method of forming a composition on an underlying film of a substrate by using a mold includes detecting, as an index indicating a state of the underlying film, at least one of an intensity and a wavelength of reflected light obtained from the substrate by irradiating the substrate with light; determining, based on the detected index, a measurement condition for measuring a position of a mark of the substrate; bringing ...