US Patent Issued to CANON on July 28 for "Method of obtaining array of plurality of regions on substrate, exposure method, exposure apparatus, method of manufacturing article, non-transitory computer-readable storage medium, and information processing apparatus" (Japanese Inventors)

ALEXANDRIA, Va., July 28 -- United States Patent no. 12,693,604, issued on July 28, was assigned to CANON K.K. (Tokyo).

"Method of obtaining array of plurality of regions on substrate, exposure method, exposure apparatus, method of manufacturing article, non-transitory computer-readable storage medium, and information processing apparatus" was invented by Mitsuru Inose (Ibaraki, Japan) and Ryota Makino (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of obtaining an array of a plurality of regions on a substrate, including obtaining position measurement data by measuring a mark assigned to each sample region among the plurality of regions on the substrate, and estimating a position of ...