US Patent Issued to Canon on July 21 for "Film forming system, method for controlling film forming system, and article manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,686,567, issued on July 21, was assigned to Canon K.K. (Tokyo).

"Film forming system, method for controlling film forming system, and article manufacturing method" was invented by Takeshi Yamamoto (Kanagawa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A film forming system includes a conveyance carrier configured to hold a substrate and a mask and move inside a conveyance path, the substrate including a film formation area, the mask being configured to shield a film non-formation area other than the film formation area, a conveyance unit disposed on the conveyance path and configured to move the conveyance carrier in a first direction and a sec...