US Patent Issued to Canon on July 14 for "Temperature adjustment apparatus, lithography apparatus, and article manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., July 14 -- United States Patent no. 12,681,394, issued on July 14, was assigned to Canon K.K. (Tokyo).

"Temperature adjustment apparatus, lithography apparatus, and article manufacturing method" was invented by Naoki Funabashi (Tochigi, Japan), Mizuki Narimatsu (Tochigi, Japan) and Tsutomu Takenaka (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A temperature adjustment apparatus includes a blowing unit configured to blow a temperature-adjusted gas to an optical path of an optical system via an opening portion, wherein a shape of an outer periphery of the opening portion includes a depressed portion depressed inward from a circumscribed circle of the opening portion, wherein i...