US Patent Issued to CANON on Jan. 20 for "Imprint apparatus, imprint method and article manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,528,243, issued on Jan. 20, was assigned to CANON K.K. (Tokyo).

"Imprint apparatus, imprint method and article manufacturing method" was invented by Takehiko Ueno (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus including a mold deformation mechanism configured to deform a mold by applying a pressure to the mold, a substrate deformation mechanism configured to deform the substrate by applying a pressure to the substrate, a measurement unit configured to measure a deformation amount of the mold and a deformation amount of the substrate during separating the mold from the cured imprint material on the substrate, and a co...