US Patent Issued to CANON on Feb. 10 for "Control device, lithography apparatus, and article manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,547,892, issued on Feb. 10, was assigned to CANON K.K. (Tokyo).

"Control device, lithography apparatus, and article manufacturing method" was invented by Naoki Kiyohara (Tokyo) and Naoki Kita (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A control device controls an object to be controlled. The device includes a generator configured to generate a probability distribution used to determine a manipulated variable, and a determinator configured to determine the manipulated variable based on the probability distribution generated by the generator. In an operation phase, the determinator determines the manipulated variable in accordance with...