ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,504,683, issued on Dec. 23, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus, imprint method, storage medium, and method of manufacturing article" was invented by Kenichi Kobayashi (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus comprising a plurality of gas supply units configured to supply a gas to a space between a mold and a substrate; and a control unit configured to control the gas supply units and an imprint operation to sequentially imprint on a plurality of imprint regions of the substrate; wherein the control unit acquires position information of the imprint regions on the substrate, imprint order info...