US Patent Issued to CANON on Aug. 25 for "Evaluation apparatus, information processing apparatus, computer-readable storage medium, film forming system, and article manufacturing method" (Japanese Inventor)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,718,349, issued on Aug. 25, was assigned to CANON K.K. (Tokyo).

"Evaluation apparatus, information processing apparatus, computer-readable storage medium, film forming system, and article manufacturing method" was invented by Satoru Jimbo (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "An evaluation apparatus includes an obtaining unit configured to obtain an image of an evaluation region including a film forming region on which a film is formed by a film forming process, and a processor configured to process the image for the evaluation. The processor is configured to output a feature concerning an abnormality in the image in accordance with a le...