US Patent Issued to CANON on Aug. 18 for "Film formation apparatus, film formation method, imprinting apparatus, planarization apparatus, and article manufacturing method" (Japanese Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,710,695, issued on Aug. 18, was assigned to CANON K.K. (Tokyo).

"Film formation apparatus, film formation method, imprinting apparatus, planarization apparatus, and article manufacturing method" was invented by Ken Katsuta (Saitama, Japan), Hideki Imamura (Tochigi, Japan) and Toshiki Ito (Kanagawa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A film formation apparatus that can easily control spread of an end of a film to be formed is provided. The film formation apparatus is a film formation apparatus configured to form a film of a curable composition in a space between a substrate and a mold by pressing the mold on the curable composition disp...