ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,704,794, issued on Aug. 11, was assigned to CANON K.K. (Tokyo).
"Imprinting method, imprint apparatus and article manufacturing method" was invented by Yuji Sakata (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "The throughput is improved by changing a timing of beginning aligning between a mold and a substrate depending on an area in a pattern-forming region where a pattern can be formed. An imprinting method for forming a pattern of an imprint material in a plurality of pattern-forming regions on a substrate using a mold having a pattern portion, having contacting the mold and the imprint material and relatively aligning the mold and th...