ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,703,140, issued on Aug. 11, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus and article manufacturing method" was invented by Tomokazu Taki (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus including a measurement unit configured to measure a distance to a surface of a mold held by a mold holding unit, thereby obtaining a measurement value, and a control unit configured to perform measurement processing of measuring the distance by the measurement unit for a plurality of portions of a structure provided on the surface of the mold while driving the measurement unit, wherein the measurement value includes a cyclic ...