ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,703,139, issued on Aug. 11, was assigned to CANON K.K. (Tokyo).
"Imprint apparatus and article manufacturing method" was invented by Hiroyuki Koide (Tochigi, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An imprint apparatus performs alignment between a substrate and a mold in a state in which the mold is in contact with an imprint material on the substrate, and then cures the imprint material by light irradiation. The apparatus includes a light irradiator configured to perform first light irradiation for partially curing the imprint material, and second light irradiation for deforming the substrate, and a controller configured to control the lig...