US Patent Issued to Canon on April 7 for "Compound introduction apparatus and compound introduction method" (Japanese Inventors)

ALEXANDRIA, Va., April 7 -- United States Patent no. 12,595,491, issued on April 7, was assigned to Canon K.K. (Tokyo).

"Compound introduction apparatus and compound introduction method" was invented by Yoshinori Itoh (Kanagawa, Japan), Tatsuaki Orihara (Tokyo), Shinichi Sakurada (Tokyo), Tsutomu Shiratori (Tokyo), Sachiko Yamauchi (Kanagawa, Japan), Nobuyuki Kuwabara (Tokyo), Futoshi Hirose (Kanagawa, Japan) and Takeshi Okada (Kanagawa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a compound introduction apparatus including: a processing chamber; a first heater that introduces an introduction-target compound into a cell inside the processing chamber; a supply flow channel for supplying a...