US Patent Issued to Canon on April 21 for "Systems, devices, and methods for registering a superstrate of an imprint tool" (Texas Inventors)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,610,784, issued on April 21, was assigned to Canon K.K. (Tokyo).

"Systems, devices, and methods for registering a superstrate of an imprint tool" was invented by Xiaoming Lu (Cedar Park, Texas) and Jeffrey Dean Klein (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Some devices, systems, and methods hold a periphery of a back surface of a plate with a flexible ring portion of a chuck assembly; apply a negative vacuum pressure to a central portion of the back surface of the plate to bow the central portion of the plate such that the back surface of the plate forms a convex surface and a front surface of the plate forms a concave surface; me...