US Patent Issued to CANON on April 21 for "Position measuring method, method for manufacturing article, position measuring apparatus, semiconductor manufacturing apparatus, and imprint apparatus" (Japanese Inventor)

ALEXANDRIA, Va., April 21 -- United States Patent no. 12,607,945, issued on April 21, was assigned to CANON K.K. (Tokyo).

"Position measuring method, method for manufacturing article, position measuring apparatus, semiconductor manufacturing apparatus, and imprint apparatus" was invented by Nozomu Hayashi (Tochigi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A position measuring method includes an image capturing element for capturing an image of an alignment mark. The method includes first processing of setting processing areas on the image capturing element for capturing an image of the alignment mark and performing position measurement processing, and second processing of calculating a position o...