US Patent Issued to CANON ANELVA on Dec. 23 for "Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly" (Japanese Inventors)

ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,505,979, issued on Dec. 23, was assigned to CANON ANELVA Corp. (Kawasaki, Japan).

"Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly" was invented by Yasushi Yasumatsu (Kawasaki, Japan), Naoyuki Okamoto (Kawasaki, Japan), Masashi Tsujiyama (Kawasaki, Japan) and Fumihito Suzuki (Kawasaki, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an ion beam processing apparatus including an ion generation chamber, a processing chamber, and electrodes to form an ion beam by extracting ions generated in the ion generation chamber to the processing chamber. The electrodes includes a first electrode disposed ...