US Patent Issued to Bruker Technologies on Jan. 27 for "Analysis of x-ray scatterometry data using deep learning" (Israeli, American Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,535,438, issued on Jan. 27, was assigned to Bruker Technologies Ltd. (Migdal HaEmek, Israel).

"Analysis of x-ray scatterometry data using deep learning" was invented by Andrei Baranovskiy (Haifa, Israel), Inbar Grinberg (Ramat Yishay, Israel), Michael G. Greene (Migdal HaEmek, Israel) and Matthew Wormington (Highlands Ranch, Colo.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for training a neural network (NN), the method includes: receiving a training dataset including: (a) multiple pairs of: (i) a diffraction image indicative of X-ray photons diffracted from structures formed in a sample responsively to directing an incident X-ray beam at an...