US Patent Issued to BROOKS AUTOMATION US on June 23 for "Process apparatus with on-the-fly substrate centering" (New Hampshire Inventor)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,666,905, issued on June 23, was assigned to BROOKS AUTOMATION US LLC (Chelmsford, Mass.).

"Process apparatus with on-the-fly substrate centering" was invented by Leigh F. Sharrock (Londonderry, N.H.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the do...