US Patent Issued to Brooks Automation US on Feb. 24 for "Substrate mapping apparatus and method therefor" (California Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,564,003, issued on Feb. 24, was assigned to Brooks Automation US LLC (Chelmsford, Mass.).

"Substrate mapping apparatus and method therefor" was invented by Radik Sunugatov (Santa Clara, Calif.), Roy R. Wang (Palo Alto, Calif.), Karl Shieh (Fremont, Calif.), Justo Graciano (Hayward, Calif.), Austin Wise (Mountain View, Calif.), Casper Hansen (Mountain View, Calif.) and Erick Pastor (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A semiconductor wafer mapping apparatus comprising a frame forming a wafer load opening communicating with a load station for a substrate carrier disposed to hold more than one wafers vertically distributed in th...