ALEXANDRIA, Va., May 12 -- United States Patent no. 12,626,885, issued on May 12, was assigned to Axcelis Technologies Inc. (Beverly, Mass.).
"Wire or rod shaped extraction electrode optics" was invented by Neil Colvin (Merrimack, N.H.), Paul Silverstein (Arlington, Mass.) and Joshua Abeshaus (Salem, Mass.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electrode apparatus for an ion implantation system has a base plate having a base plate aperture and at least one securement region. A securement apparatus is associated with each securement region, and a plurality of electrode rods are selectively coupled to the base plate by the securement apparatus. The plurality of electrode rods have a predetermined sh...