US Patent Issued to Axcelis Technologies on March 3 for "Twist and tilt verification using diffraction patterns" (Massachusetts Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,566,064, issued on March 3, was assigned to Axcelis Technologies Inc. (Beverly, Mass.).

"Twist and tilt verification using diffraction patterns" was invented by Phillip Geissbuhler (Winchester, Mass.), FHM Faridur Rahman (Boxford, Mass.) and Neil Bassom (Hamilton, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A light source directs an incident beam at a surface of the workpiece on a stage at an oblique angle. A detector images a diffraction pattern of the incident beam reflected off the workpiece. At least one of a twist angle and a tilt angle of the workpiece on the stage is determined based on the diffraction pattern. The workpiece may be a sem...