US Patent Issued to ASML NETHERLANDS on Sept. 22 for "Height measurement sensor using derivative of periodic points" (Dutch Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,742,636, issued on Sept. 22, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Height measurement sensor using derivative of periodic points" was invented by Mihaita Popinciuc (Eindhoven, Netherlands) and Thomas Per Krister Martinsson (Veldhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A height measurement sensor comprising projection and detection units. The projection unit comprises a radiation source and a projection grating comprising a projection grating spot having a plurality of grating lines, the projection grating arranged to receive radiation and output a radiation beam onto the surface to create a radiation ...