US Patent Issued to ASML Netherlands on Oct. 6 for "Operation methods of 2D pixelated detector for an apparatus with plural charged-particle beams and mapping surface potentials" (California Inventors)

ALEXANDRIA, Va., Oct. 6 -- United States Patent no. 12,755,928, issued on Oct. 6, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Operation methods of 2D pixelated detector for an apparatus with plural charged-particle beams and mapping surface potentials" was invented by Yongxin Wang (San Ramon, Calif.), Oleg Krupin (Mountain View, Calif.), Weiming Ren (San Jose, Calif.), Xuerang Hu (San Jose, Calif.) and Xuedong Liu (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of detecting charged particles may include detecting beam intensity as a primary charged particle beam moves along a first direction; acquiring a secondary beam spot projection pattern as the primary char...