US Patent Issued to ASML NETHERLANDS on Oct. 14 for "Prediction data selection for model calibration to reduce model prediction uncertainty" (California Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,443,111, issued on Oct. 14, was assigned to ASML NETHERLANDS (Veldhoven, Netherlands).

"Prediction data selection for model calibration to reduce model prediction uncertainty" was invented by Lei Wang (Los Gatos, Calif.), Yi-Yin Chen (Santa Clara, Calif.), Mu Feng (San Jose, Calif.) and Qian Zhao (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems and methods for reducing prediction uncertainty in a prediction model associated with a patterning process are described. These may be used in calibrating a process model associated with the patterning process, for example. Reducing the uncertainty in the prediction model may include deter...