US Patent Issued to ASML NETHERLANDS on Nov. 3 for "Verifying freeform curvilinear features of a mask design" (California Inventor)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,783,781, issued on Nov. 3, was assigned to ASML NETHERLANDS B.V. (Veldhoven, Netherlands).

"Verifying freeform curvilinear features of a mask design" was invented by Ayman Hamouda (Milpitas, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for verifying a feature of a mask design. The method includes determining localized shapes of the feature, and determining whether there is a breach by the feature of verification criteria based on the localized shapes. The verification criteria specifies correspondence between a threshold of a pattern characteristic and a localized shape. For example, the feature of the mask design may be a freeform curv...