ALEXANDRIA, Va., May 5 -- United States Patent no. 12,618,804, issued on May 5, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).
"Methods and apparatus for acoustic metrology" was invented by Mustafa Umit Arabul (Eindhoven, Netherlands), Zili Zhou (Veldhoven, Netherlands), Willem Marie Julia Marcel Coene (Veldhoven, Netherlands), Coen Adrianus Verschuren (Eindhoven, Netherlands), Paul Louis Maria Joseph Van Neer (Bergschenhoek, Netherlands), Daniele Piras (Amsterdam), Sandra Blaak (Zwijndrecht, Netherlands), Wouter Dick Koek (Zoetermeer, Netherlands) and Robert Wilhelm Willekers (Veldhoven, Netherlands).
According to the abstract* released by the U.S. Patent & Trademark Office: "A metrology apparatus for determining one or ...