US Patent Issued to ASML Netherlands on May 12 for "Interface plate, inspection system and method of installing an inspection system" (Dutch, American Inventors)

ALEXANDRIA, Va., May 12 -- United States Patent no. 12,625,438, issued on May 12, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Interface plate, inspection system and method of installing an inspection system" was invented by Marcel Koenraad Marie Baggen (Nuenen, Netherlands), Jasper Hendrik Grasman (Waalre, Netherlands), Chin-Fa Tu (San Jose, Calif.) and Lucas Kuindersma (Eindhoven, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "An interface plate for mounting an apparatus or an assembly of an apparatus to a floor or floor plate is described, the interface plate comprising: an install block having an install surface configured to receive an interface surface of the apparatus o...