US Patent Issued to ASML Netherlands on June 23 for "On chip sensor for wafer overlay measurement" (Dutch, American Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,729, issued on June 23, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"On chip sensor for wafer overlay measurement" was invented by Mohamed Swillam (Wilton, Conn.), Stephen Roux (New Fairfield, Conn.), Tamer Mohamed Tawfik Ahmed Mohamed Elazhary (New Canaan, Conn.) and Arie Jeffrey Den Boef (Waalre, Netherlands).

According to the abstract* released by the U.S. Patent & Trademark Office: "A sensor apparatus includes a sensor chip, an illumination system, a first optical system, a second optical system, and a detector system. The illumination system is coupled to the sensor chip and transmits an illumination beam along an illumination path. The first optical syst...