US Patent Issued to ASML Netherlands on Feb. 24 for "Method and system of sample edge detection and sample positioning for image inspection apparatus" (California Inventors)

ALEXANDRIA, Va., Feb. 24 -- United States Patent no. 12,560,556, issued on Feb. 24, was assigned to ASML Netherlands B.V. (Veldhoven, Netherlands).

"Method and system of sample edge detection and sample positioning for image inspection apparatus" was invented by Xiaodong Meng (San Jose, Calif.), Zhiwen Kang (San Jose, Calif.), Jian Zhang (San Jose, Calif.) and Kangsheng Qiu (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Systems, apparatuses, and methods for detecting a location of a positioned sample may include an electrostatic holder configured to hold a sample and form a gap area between an outside edge of the sample and a structure of the electrostatic holder when the electrostatic hold...